Digital Repository, ICF12, Ottawa 2009
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ICF12, Ottawa 2009
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Fracture Processes and Reliability In Micro- and Nanoelectronics, Geophysics & Tectonics, Fracture Of Membranes
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Auersperg
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Crack and delamination Risk Evaluation in low-k BEol
J. Auersperg, D. Vogel, M.U. Lehr, M. Grillberger, B. Michel
Last modified: 2013-05-06
Abstract
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